China Vacuum Pumps Manufacturer

Vacuum Pumps for PVD Coating Systems

Shanghai Zenix Vacuum Coating Technology Co., Ltd. is a China-based Vacuum Pumps manufacturer with nearly 40 years of experience in vacuum coating equipment. Our vacuum pump range is engineered to support the demanding evacuation and process requirements of PVD hard coating, decorative coating, and functional coating systems. We supply pumps that form the critical foreline stage, ensuring rapid pump-down, stable base pressure, and reliable operation across continuous production cycles.

As a dedicated Vacuum Pumps supplier, we focus on mechanical pump / foreline pump solutions that integrate directly with our coating machines and can also be specified for existing vacuum systems. Our engineering team selects and configures each pump based on chamber volume, target gas load, required ultimate pressure, and process duty cycle.

Our Vacuum Pump Range

We currently offer one core product family within this category, with configuration options to match different PVD system sizes and process requirements.

Application Fit Across Coating Processes

Our vacuum pumps are selected to match the specific demands of different PVD coating applications. The table below summarizes typical process requirements and how our pump configurations address them.

Engineering and Quality Assurance

Our vacuum pumps are built with high-strength alloys and advanced heat treatment for core components, achieving an average service life exceeding 20,000 hours under normal industrial conditions. We optimize the oil circuit and sealing design to reduce energy consumption and emissions, lowering long-term operating costs.

Each pump undergoes factory testing before shipment. We verify ultimate pressure, pumping speed, noise level, and leak tightness. Our quality control includes helium leak detection and performance benchmarking against reference standards. Pumps are packaged with protective covers and desiccant to prevent contamination during transit.

Integration with Coating Machines

Our vacuum pumps are designed for seamless integration with PVD Hard Coating Machine, Decorative PVD Coating Machine, and Functional Coating Machine systems. We provide the necessary inlet/outlet flanges, oil mist filters, and vibration isolation mounts. For existing installations, we can supply replacement pumps with matching interfaces and performance specifications.

We also offer commissioning support, including pump-down curve verification, leak checking, and operator training on maintenance procedures.

Information We Use to Configure Your Solution

To prepare an accurate proposal, we typically require the following project details:

• Chamber volume and required evacuation time
• Target ultimate pressure and process gas load
• Coating type (hard, decorative, functional) and substrate materials
• Existing high-vacuum pump model and backing requirements
• Available utilities: power supply, cooling water, compressed air
• Installation environment: cleanroom class, ambient temperature, noise limits
• Required documentation and acceptance criteria

Maintenance and Spare Parts

We supply genuine spare parts including oil, filters, seals, and vanes. Our service team can provide preventive maintenance schedules and remote troubleshooting. For global customers, we coordinate with local service partners to ensure timely support.

Frequently Asked Questions